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Lithography machines alone cost about as much as the entire building put up to house them.
Drawn from what Brian Potter said
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Structural engineer and writer
The cost of lithography machines is often estimated as 20% of the cost of a new fab, which means that lithography tools can cost as much as the entire fab facility itself.
Where this was said
↗How to Build a $20 Billion Semiconductor Fabconstruction-physics.com
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